Microelectromechanic Systems
Mechatronics Engineering
Institute of Natural and Applied Sciences
Third Cycle (Doctorate Degree)
| Course Unit Title | Course Unit Code | Type of Course Unit | Level of Course Unit | Year of Study | Semester | ECTS Credits |
|---|---|---|---|---|---|---|
| Microelectromechanic Systems | MKT603 | Elective | Doctorate degree | 1 | Fall | 8 |
Name of Lecturer(s)
Prof. Dr. Metin AYDIN
Learning Outcomes of the Course Unit
1) Define types of MEMS
2) Define materials used in MEMS systems
3) Recognize MEMS production methods
4) Recognize components used in MEMS
Program Competencies-Learning Outcomes Relation
| Program Competencies | |||||
| 1 | 2 | 3 | 4 | ||
| Learning Outcomes | |||||
| 1 | No relation | Middle | Low | No relation | |
| 2 | No relation | No relation | No relation | No relation | |
| 3 | No relation | No relation | No relation | No relation | |
| 4 | No relation | No relation | No relation | No relation | |
Mode of Delivery
Face to Face
Prerequisites and Co-Requisites
None
Recommended Optional Programme Components
MKT433
Course Contents
In this lecture, candidates are provided with in-depth knowledge on introduction to MEMS, history, applications, materials, MEMS production methods, computer aided design process, sensors, transducers, MEMS market and its future.
Weekly Schedule
1) Introduction to MEMS2) Mechanical and electrical properties of MEMS materials
3) Mechanical and electrical properties of MEMS materials
4) Integrated-circuits based microfabrication technology
5) Integrated-circuits based microfabrication technology
6) Microstructural elements
7) Microstructural elements
8) Midterm examination/Assessment
9) Sensors used in MEMS
10) Sensors used in MEMS
11) Actuators used in MEMS
12) MEMS for use in biomedical world
13) Interface circuits for MEMS microsystems
14) Interface circuits for MEMS microsystems
15) Packaging, assembly and testing
16) Final examination
Recommended or Required Reading
1- MEMS and microsystems: Design and Manufacture, Tai-Ran Hsu
2- Foundations of MEMS (2nd Edition), Chang Liu
3- Microsystem Design, Stephen D. Senturia
4- Practical MEMS, Ville Kaajakari
Planned Learning Activities and Teaching Methods
1) Lecture
2) Discussion
3) Demonstration
4) Group Study
5) Problem Solving
Assessment Methods and Criteria
Contribution of Semester Studies to Course Grade |
70% |
||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
|
|||||||||||||||
Contribution of Final Examination to Course Grade |
30% |
||||||||||||||
Total | 100% | ||||||||||||||
Language of Instruction
Turkish
Work Placement(s)
Not Required