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Course Unit Title Course Unit Code Type of Course Unit Level of Course Unit Year of Study Semester ECTS Credits
Semiconductor Production Technology MEH569 Elective Master's degree 1 Fall 10

Name of Lecturer(s)

Prof. Dr. Ali TANGEL

Learning Outcomes of the Course Unit

1) Use the basic steps of solid state fabrication technology in device design
2) Work in MOS fabrication technology
3) Work in bipolar fabrication process
4) Work in BiCMOS fabrication technology
5) Use TCAD process simulation tools such as Sentaurus, and Tsuprem-IV

Program Competencies-Learning Outcomes Relation

  Program Competencies
1 2 3 4 5 6 7
Learning Outcomes
1 No relation No relation No relation No relation No relation No relation No relation
2 No relation No relation No relation No relation No relation No relation No relation
3 No relation No relation No relation No relation No relation No relation No relation
4 No relation No relation No relation No relation No relation No relation No relation
5 No relation No relation No relation No relation No relation No relation No relation

Mode of Delivery

Face to Face

Prerequisites and Co-Requisites

None

Recommended Optional Programme Components

VLSI Design Electronics-1 Electronics-2

Course Contents

Wafer Growth Photolithography Oxidation Deposition Etching Epitaxial Growth Ion Implantation Metallization Packaging Bipolar Process MOS Process CMOS Process BICMOS Process TCAD Process simulation tools

Recommended or Required Reading

Planned Learning Activities and Teaching Methods



Assessment Methods and Criteria

Contribution of Midterm Examination to Course Grade

40%

Contribution of Final Examination to Course Grade

60%

Total

100%

Language of Instruction

Turkish

Work Placement(s)

Not Required